Nouryon High Purity Metalorganic cylinders (also referred to as bubblers or canisters) are designed and manufactured to the highest standards in industrial semiconductor manufacturing technologies:
We supply our high purity metalorganics in a wide variety of cylinder sizes. An overview of available cylinders can be found in our brochure.
For the delivery of solid precursors like trimethylindium ( TMIn) we have designed a unique delivery systems called Hiperquad and Hiperloop. This innovative design offers the following benefits:
The Hiperloop and Hiperquad do not require any extra connections or fittings when compared with conventional bubblers. For proper operation of these delivery systems, please contact us to obtain the operation instructions. Further technical details are available in our technical bulletin.
The use of level sensing has allowed cylinder changes to be accurately predicted and has enabled greater streamlining of production processes. Level sensors are particularly important for dopant sources. Having a level sensor can reduce the risk of depleting the source material during a growth run.
Our level sensors have external electronic indicators so that the level can be viewed from outside of the gas cabinet. Since the measuring principle is based in ultrasonic detection, no calibration required.
For more information about our level sensing equipment, please contact us.
A stable thermal environment designed to achieve a low cost and easily implemented solution for bulk delivery.cabinet cylinder heat exchanger that operates in conjunction with your conventional constant temperature bath and circulator pump. It not only allows an easy, cost effective conversion to large capacity cylinders which reduces production downtime, but also provides a more stable thermal condition for the cylinder and your gas cabinet which improves flow stability.